Tunneling Effect In Mosfet



HomeMaterials Science ForumMaterials Science Forum Vol. 1004Tunneling Effects in NH3 Annealed 4H-SiC Trench..

Abstract:

The interface between the gate oxide and silicon carbide (SiC) has a strong influence on the performance and reliability of SiC MOSFETs and thus, requires special attention. In order to reduce charge trapping at the interface, post oxidation anneals (POAs) are conventionally applied. However, these anneals do not only influence the device performance, such as mobility and on-resistance, but also the gate oxide reliability. We study the oxide tunneling mechanisms of NH3 annealed 4H-SiC trench MOSFET test structures and compare them to devices which received a NO POA. We show that 3 different mechanisms, namely trap assisted tunneling (TAT), Fowler-Nordheim (FN) tunneling and charge trapping are found for NH3 annealed MOS structures whereas only FN-tunneling is observed in NO annealed devices.The tunneling barrier suggest a trap level with an effective activation energy of 382 meV to enable TAT.

Hiroshi Yano, Dr. Takeshi Ohshima, Kazuma Eto, Shinsuke Harada, Takeshi Mitani and Yasunori Tanaka

4H-SiC, Fowler-Nordheim Tunneling, Gate Oxide Reliability, NH3 Post Oxidation Annealing, Trap Assisted Tunneling, Trench MOSFET

Note that in a TFET, the electrons tunnel between conduction and valence bands as they move into the channel. This is in contrast to what happens in a MOSFET, in which. The tunnel field-effect transistor (TFET) is an experimental type of transistor. Even though its structure is very similar to a metal-oxide-semiconductor field-effect transistor (MOSFET), the fundamental switching mechanism differs, making this device a promising candidate for low power electronics.

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Tunneling Effect In Mosfet Testing

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Tunneling Effect In Mosfet Circuit

Gate

Gate Tunneling Effect In Mosfet

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